0102030405
UV negative photoresist
ST-PR201 series
- Negative chemical amplification film
◎ High aspect ratio, high verticality, and high transparency
◎ High chemical stability and excellent temperature resistance
◎ Can be used as a passivation layer or protective layer
◎ Applicable to MEMS fabrication, microfluidics, biochips, and optoelectronic devices
◎ An excellent material for manufacturing various body structures and performing LIGA processes 
Figure: ST-PR201 spin coating rotational speed versus thickness curve
ST-PR20M series
- ◎ Excellent anti-etching performance
◎ Suitable for PVD and lift-off processes
◎ Excellent chemical stability, suitable for electroplating processes
◎ thermostability 
